VAMAS Surface Chemical Analysis Standard Data Transfer Format 1988 May 4
XI Ltd.
XI Spectral Data Processor
XI ASCII
Aluminium: Al(2p3) & Al(2p1),BE Cu(2p3)=932.64eV
1
0.05 eV/step, Sum of 11 repetitive etch/scans
NORM
REGULAR
1
0
0
0
0
0
1
0.05 eV/step, Sum of 11 repetitive etch/scans
Aluminium: Al(2p3) & Al(2p1),BE Cu(2p3)=932.64eV
2003
4
25
22
8
42
0
0
XPS
X-RAY Source
1486.6
200
250
1000
55
90
FAT
14.28
1
0
0
1000
2000
55
0
data_1
data_1
-1
Binding energy
eV
85
-0.05
2
counts
d
Transmission
d
pulse counting
0.1
44
4.00E-06
0
0
0
0
802
28
3287
0.375082
0.377749
207
0.377749
218
0.377742
177
0.377735
179
0.377728
178
0.377722
187
0.377715
151
0.377708
204
0.377702
180
0.377695
175
0.377688
154
0.377681
185
0.377675
204
0.377668
178
0.377661
169
0.377654
186
0.377648
188
0.377641
193
0.377634
178
0.377627
185
0.377621
165
0.377614
157
0.377607
174
0.377601
174
0.377594
160
0.377587
173
0.37758
184
0.377574
196
0.377567
155
0.37756
159
0.377553
163
0.377547
182
0.37754
191
0.377533
159
0.377527
175
0.37752
188
0.377513
174
0.377506
170
0.3775
166
0.377493
181
0.377486
179
0.377479
155
0.377473
200
0.377466
164
0.377459
152
0.377453
162
0.377446
156
0.377439
183
0.377432
158
0.377426
169
0.377419
158
0.377412
173
0.377406
150
0.377399
172
0.377392
174
0.377385
132
0.377379
151
0.377372
160
0.377365
147
0.377358
125
0.377352
150
0.377345
159
0.377338
156
0.377332
165
0.377325
154
0.377318
147
0.377311
141
0.377305
150
0.377298
131
0.377291
137
0.377285
136
0.377278
120
0.377271
146
0.377264
113
0.377258
104
0.377251
123
0.377244
136
0.377238
146
0.377231
133
0.377224
110
0.377218
132
0.377211
134
0.377204
123
0.377197
140
0.377191
116
0.377184
116
0.377177
112
0.377171
116
0.377164
156
0.377157
107
0.37715
109
0.377144
123
0.377137
125
0.37713
116
0.377124
93
0.377117
105
0.37711
127
0.377104
103
0.377097
110
0.37709
112
0.377083
109
0.377077
114
0.37707
127
0.377063
136
0.377057
101
0.37705
119
0.377043
120
0.377036
103
0.37703
114
0.377023
88
0.377016
107
0.37701
107
0.377003
122
0.376996
117
0.37699
100
0.376983
105
0.376976
126
0.37697
118
0.376963
110
0.376956
106
0.376949
121
0.376943
100
0.376936
116
0.376929
120
0.376923
120
0.376916
99
0.376909
107
0.376903
120
0.376896
108
0.376889
115
0.376882
111
0.376876
107
0.376869
109
0.376862
112
0.376856
108
0.376849
113
0.376842
102
0.376836
106
0.376829
130
0.376822
126
0.376816
107
0.376809
122
0.376802
127
0.376796
126
0.376789
114
0.376782
114
0.376775
128
0.376769
140
0.376762
108
0.376755
110
0.376749
104
0.376742
118
0.376735
132
0.376729
106
0.376722
130
0.376715
122
0.376709
127
0.376702
142
0.376695
132
0.376689
124
0.376682
132
0.376675
111
0.376669
143
0.376662
123
0.376655
131
0.376649
146
0.376642
137
0.376635
132
0.376628
159
0.376622
131
0.376615
162
0.376608
116
0.376602
148
0.376595
133
0.376588
131
0.376582
150
0.376575
129
0.376568
145
0.376562
160
0.376555
128
0.376548
124
0.376542
109
0.376535
144
0.376528
172
0.376522
137
0.376515
142
0.376508
144
0.376502
161
0.376495
171
0.376488
169
0.376482
177
0.376475
180
0.376468
190
0.376462
169
0.376455
167
0.376448
163
0.376442
175
0.376435
154
0.376428
199
0.376422
193
0.376415
201
0.376408
205
0.376402
189
0.376395
185
0.376388
211
0.376382
213
0.376375
207
0.376368
205
0.376362
226
0.376355
199
0.376348
215
0.376342
236
0.376335
213
0.376328
228
0.376322
281
0.376315
271
0.376308
286
0.376302
249
0.376295
274
0.376288
290
0.376282
291
0.376275
348
0.376268
322
0.376262
367
0.376255
396
0.376248
406
0.376242
407
0.376235
452
0.376228
506
0.376222
553
0.376215
625
0.376208
764
0.376202
881
0.376195
1114
0.376188
1369
0.376182
1647
0.376175
1910
0.376169
2220
0.376162
2402
0.376155
2197
0.376149
2049
0.376142
1983
0.376135
2085
0.376129
2504
0.376122
2855
0.376115
3287
0.376109
3240
0.376102
3012
0.376095
2358
0.376089
1740
0.376082
1025
0.376075
609
0.376069
400
0.376062
229
0.376055
163
0.376049
107
0.376042
95
0.376036
77
0.376029
73
0.376022
69
0.376016
66
0.376009
67
0.376002
57
0.375996
72
0.375989
54
0.375982
46
0.375976
70
0.375969
64
0.375962
42
0.375956
60
0.375949
56
0.375943
57
0.375936
53
0.375929
57
0.375923
67
0.375916
68
0.375909
61
0.375903
48
0.375896
61
0.375889
52
0.375883
58
0.375876
60
0.375869
53
0.375863
67
0.375856
54
0.37585
54
0.375843
52
0.375836
67
0.37583
63
0.375823
46
0.375816
61
0.37581
51
0.375803
54
0.375796
50
0.37579
45
0.375783
55
0.375777
55
0.37577
70
0.375763
47
0.375757
40
0.37575
39
0.375743
53
0.375737
38
0.37573
60
0.375724
44
0.375717
46
0.37571
51
0.375704
48
0.375697
31
0.37569
39
0.375684
48
0.375677
58
0.37567
43
0.375664
39
0.375657
41
0.375651
55
0.375644
43
0.375637
44
0.375631
56
0.375624
51
0.375617
49
0.375611
62
0.375604
40
0.375598
51
0.375591
39
0.375584
46
0.375578
56
0.375571
48
0.375565
50
0.375558
47
0.375551
28
0.375545
53
0.375538
53
0.375531
45
0.375525
51
0.375518
46
0.375512
47
0.375505
45
0.375498
56
0.375492
55
0.375485
45
0.375478
48
0.375472
49
0.375465
48
0.375459
48
0.375452
39
0.375445
30
0.375439
64
0.375432
49
0.375426
50
0.375419
65
0.375412
48
0.375406
46
0.375399
52
0.375392
47
0.375386
54
0.375379
36
0.375373
37
0.375366
38
0.375359
45
0.375353
49
0.375346
35
0.37534
45
0.375333
49
0.375326
51
0.37532
47
0.375313
48
0.375307
44
0.3753
56
0.375293
55
0.375287
43
0.37528
46
0.375273
50
0.375267
46
0.37526
46
0.375254
48
0.375247
54
0.37524
62
0.375234
38
0.375227
47
0.375221
59
0.375214
54
0.375207
50
0.375201
50
0.375194
55
0.375188
43
0.375181
47
0.375174
48
0.375168
58
0.375161
52
0.375155
56
0.375148
65
0.375141
51
0.375135
43
0.375128
47
0.375122
41
0.375115
52
0.375108
47
0.375102
64
0.375095
44
0.375089
55
0.375082
end of experiment
